XRS-FP2 is a quantitative analysis software package for material analysis using XRF, XRF Thin Film, or EPXA (SEM/Microanalysis) X-ray spectroscopy techniques. The single, integrated software package can be used in 3 different modes depending on the users applications and requirements.
- XRS-FP2 – Single-layer samples, for compositional and single-layer thickness analysis.
- XRS-FP2 MTF (*) – Multi-layer, thin-film samples, for composition and multi-layer thickness analysis
- XRS-FP2 EPXA (*) – Single-layer samples, for composition and single-layer thickness using an incident electron beam instead of and X-ray beam
(*) XRS-FP2 MTF and XRS-FP2 EPXA options do not come standard with the XRS-FP2 software package, they are upgrade options for purchase.
The software package allows for complete XRF analysis using fundamental parameters (FP) for either bulk materials, single-layer thin-film materials, or multi-layer analysis for thickness and composition. Complete XRF analysis is possible, with or without standards, using an internal database of fundamental parameters (FP) such as absorption coefficients, fluorescence yields, transition probabilities, etc., and complete modeling of detectors and sources.
All versions of the software process the raw X-ray spectra collected from X-ray detectors and signal processors to obtain:
- Elemental peak intensities (i.e. the area of the peaks)
- Elemental concentrations and/or film thicknesses
Spectrum processing libraries are available for removing spectrum artifacts (escape and sum peaks), background and for various least-squares peak-fitting models synthetic Gaussian and experimental reference profiles or overlap factors.
In the case of EPXA analysis, the software performs ZAF or Cliff-Lorimer (CL) calculations for spectra taken on an SEM or TEM for CL, fitted with an EDS detector for either bulk or single-layer thin-film materials.
The XRS-FP2 software features simplified installation, user setup, data storage and tracking. New features include split screen mode, workflow-based software, and built-in file manager. The “modern GUI” with ease of use push buttons, takes advantage of the increased analysis ability of XRS-FP2. The software can be set in either Easy or Expert modes of operation.
- Analyze up to 55 elements at a time. Analysis can be performed for all elements from H through Fm, using K, L or M lines, in the energy range from 0.1 keV up to 80 keV.
- Supports measurement of bulk composition, and composition and thickness of a single layer (XRF or EPXA).
- XRS-FP2 MTF allows for the simultaneous measurement of interlayer composition and film thickness of up to 8 layers
- Up to 8 experimental conditions can be defined with full control of measurement and spectrum processing parameters
- Includes full correction for losses due to attenuation in air, detector windows, contact and dead layers, the detector’s active volume, and filters inserted between the tube and sample or between the sample and detector. These are calculated from the user-input parameters defining the excitation source, the detector, and the spectrometer geometry.
- Spectrum processing parameters include quantities to automatically define the background continuum and correct for pile-up (sum) and escape peaks, smoothing, and/or use a measured background spectrum.
- The X-ray peak intensities for all elements can be modeled as a sum of Gaussian functions or by integrating the net area of the peak, using a measured reference X-ray peak response, or overlap factors.
- Linear or nonlinear Gaussian peak fitting. For the nonlinear method, the centroid and resolution of the peaks is adjusted for the optimum fit. The linear method uses set values for the line ratios, the peak positions and widths.
- Quantitative analysis using a pure fundamental parameter approach (FP, MTFFP) , fundamental parameters with scatter ratios (SIRFP) (for samples consisting of low-Z elements), or by simple empirical least square (LSQ) fitting. In the case of the XRF-FP2 EPXA option, quantitative analysis can be implemented using ZAF for bulk samples, or Cliff- Lorimer (CL) for thin films.
- Fundamental parameter analysis can be based on calibration from a single or multi-element standard, multiple standards, or no standards. Standardless analysis requires accurate definition of the tube, detector, environmental and geometry parameters.
- Fundamental parameter calculations are based upon the Sherman equation, and modern fundamental-parameter databases.
- Includes full corrections for absorption and both thick and thin-film secondary fluorescence, i.e. all matrix effects, enhancement and absorption. All possible (K, L M) X-ray lines are considered for both excitation and fluorescence.
- Tube spectra can be supplied by the user or calculated from built-in models (Ebel, Pella et al.). These tube spectra can be convolved with experimental transfer functions to derive the expected tube spectrum using X-ray optics.
- Includes both an interactive “expert mode” and an “easy mode.”
- Automatic and manual peak/element identification.
- Batch analysis for continuous and repetitive measurements with analysis trends and statistical summary.
- Extensive ActiveX/COM interface that allows functional control of XRS-FP2 via a customer developed client program.